SIMS Workstation, a UHV Surface Analysis System, for thin film depth profiling

Hiden Analytical Limited
420 Europa Boulevard
Warrington
Cheshire
WA5 7UN
United Kingdom

Tel: +44 (0) 1925 445 225
Fax: +44 (0) 1925 416 518

The Hiden SIMS Workstation is a stand-alone, general purpose, UHV SIMS/SNMS analysis system based around the MAXIM analyser.

The instrument is both powerful and easy to use with a self-tuning secondary ion column and software controlled ion guns. A normally incident video camera enables accurate sample navigation and a low energy electron flood provides trouble free analysis of insulators. The instrument is available with a choice of ion guns and sample holders enabling customers to specify the tool most suited to their application.

The use of standard UHV components throughout ensures that the
system can be easily upgraded and reconfigured, ideal for research applications as well as providing a future-proof investment. A soft tent bakeout system with integrated heater ensures UHV performance and, where required, the stand-alone pumping trolley may be mounted “through the wall” for clean room installation.

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